Semicon has defined a strict interface

A wafer has very strict dimensional properties, and this makes it an ideal interface to create interoperability across different instruments.

A robotic arm only needs to care about moving a flat surface with a known weight and radius. And the same is true for every other instrument in the chan of Making a wafer.

An Atomic Force Microscopy system (Nearfield Instruments) only needs to deal with a known sample size with strict requirements when it comes to acceleration, vibration and cleanliness. The same is true for any other deposition system ([[Advanced Materials (AMat)]]) or lithography tool (ASML).

I like to think that Fabs are a massive example of a highly developed, purposed-built, [[SDL (self-driving labs)]]. And the challenge is to define such a clean and universal interface so that other tool vendors can focus on creating interoperable systems.